Improvement of the PLD process assisted by RF plasma for AlN growth

Research areas:

• Environnement, Paléo-Environnement et Bio-Indicateurs (2011 - 2016)

Year:

2005

Authors:

• A Basillais
• R Benzerga
• H Sanchez
• Erwan Le Menn
• C Boulmer-Leborgne
• J Perriere

Journal:

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Volume:

80

Number:

4

Pages:

851-859

Month:

February

ISSN:

0947-8396

BibTex:

@article{WOS:000226460900034, author = "A Basillais and R Benzerga and H Sanchez and Erwan Le Menn and C Boulmer-Leborgne and J Perriere", doi = "10.1007/s00339-003-2325-z", extra = "PICL", issn = "0947-8396", journal = "APPLIED PHYSICS A-MATERIALS SCIENCE {\&}amp; PROCESSING", month = "FEB", number = "4", pages = "851-859", title = "{I}mprovement of the {PLD} process assisted by {RF} plasma for {A}l{N} growth", volume = "80", year = "2005", }